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1

Implementation and analysis of an automated multiscale measurement strategy for wafer scale inspection of micro electromechanical systems

Wolfram Lyda, Avinash Burla, Tobias Haist, Marc Gronle, Wolfgang Osten

Journal:

International Journal of Precision Engineering and Manufacturing

Year:

2012

Language:

english

File:

PDF, 7.55 MB

english, 2012

2

Open-source graphics processing unit–accelerated ray tracer for optical simulation

Mauch, Florian, Gronle, Marc, Lyda, Wolfram, Osten, Wolfgang

Journal:

Optical Engineering

Year:

2013

Language:

english

File:

PDF, 1021 KB

english, 2013

3

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Optical Micro- and Nanometrology IV - Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system

Gronle, Marc, Lyda, Wolfram, Burla, Avinash, Osten, Wolfgang, Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang

Year:

2012

Language:

english

File:

PDF, 4.11 MB

english, 2012

4

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Automated alignment of aspheric and freeform surfaces in a non-null test interferometer

Baer, Goran, Lehmann, Peter H., Osten, Wolfgang, Garbusi, Eugenio, Lyda, Wolfram, Gastinger, Kay, Pruss, Christof, Osten, Wolfgang

Year:

2011

Language:

english

File:

PDF, 793 KB

english, 2011

5

Improved signal model for confocal sensors accounting for object depending artifacts

Mauch, Florian, Lyda, Wolfram, Gronle, Marc, Osten, Wolfgang

Journal:

Year:

2012

Language:

english

File:

PDF, 1.15 MB

english, 2012

6

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Conceptual consideration for the process integration of optical sensors

Fleischle, David, Lehmann, Peter H., Osten, Wolfgang, Lyda, Wolfram, Mauch, Florian, Gastinger, Kay, Osten, Wolfgang

Year:

2011

Language:

english

File:

PDF, 2.20 MB

english, 2011

7

Interferometrische Messung von Freiform-Schneidkanten auf einer Diamantwerkzeugbearbeitungsmaschine

Berger, Reinhard, Fleischle, David, Körner, Klaus, Lyda, Wolfram, Osten, Wolfgang, Sobotka, Andreas, Wenzel, Christian, Brecher, Christian

Journal:

tm - Technisches Messen

Year:

2011

Language:

german

File:

PDF, 582 KB

german, 2011

8

Herausforderungen und Lösungsansätze für die fertigungsnahe Qualitätskontrolle mittels optischer 3D-Messtechnik

Fleischle, David, Lyda, Wolfram, Gronle, Marc, Mauch, Florian, Körner, Klaus, Osten, Wolfgang

Journal:

tm - Technisches Messen

Year:

2013

Language:

german

File:

PDF, 444 KB

german, 2013

9

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Interferometry XV: Applications - An assistance system for the selection of sensors in multi-scale measurement systems

Burla, Avinash, Furlong, Cosme, Gorecki, Christophe, Haist, Tobias, Lyda, Wolfram, Novak, Erik L., Osten, Wolfgang

Year:

2010

Language:

english

File:

PDF, 464 KB

english, 2010

10

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Combining rigorous diffraction calculation and GPU accelerated nonsequential raytracing for high precision simulation of a linear grating spectrometer

Mauch, Florian, Bodermann, Bernd, Fleischle, David, Lyda, Wolfram, Osten, Wolfgang, Krug, Torsten, Häring, Reto

Year:

2011

Language:

english

File:

PDF, 864 KB

english, 2011

11

Laterally chromatically dispersed, spectrally encoded interferometer

Gronle, Marc, Lyda, Wolfram, Mauch, Florian, Osten, Wolfgang

Journal:

Year:

2011

Language:

english

File:

PDF, 582 KB

english, 2011

12

itom: an open source metrology, automation, and data evaluation software

Gronle, Marc, Lyda, Wolfram, Wilke, Marc, Kohler, Christian, Osten, Wolfgang

Journal:

Year:

2014

Language:

english

File:

PDF, 1.49 MB

english, 2014

13

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Model-based, active inspection of three-dimensional objects using a multi-sensor measurement system

Gronle, Marc, Lehmann, Peter H., Osten, Wolfgang, Lyda, Wolfram, Osten, Wolfgang, Albertazzi, Armando

Year:

2013

Language:

english

File:

PDF, 1005 KB

english, 2013

14

Verlässlichkeitsanalyse von Indikator-Funktionen in einem Automatisierten Multiskalen-Messsystem

Burla, Avinash, Lyda, Wolfram, Osten, Wolfgang, Regin, Johan, Westkämper, Engelbert, Zimmermann, Jan, Sawodny, Oliver

Journal:

tm - Technisches Messen

Year:

2010

Language:

german

File:

PDF, 553 KB

german, 2010

15

Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks

Zimmermann, Jan, Sawodny, Oliver, Lyda, Wolfram, Osten, Wolfgang

Journal:

IFAC Proceedings Volumes

Year:

2010

Language:

english

File:

PDF, 1.03 MB

english, 2010

16

SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Assistant systems for efficient multiscale measurement and inspection

Burla, Avinash, Haist, Tobias, Lyda, Wolfram, Aissa, Mohamed Hassanine, Osten, Wolfgang, Lehmann, Peter H., Osten, Wolfgang, Gastinger, Kay

Year:

2011

Language:

english

File:

PDF, 3.06 MB

english, 2011

17

Multisensorisches Messsystem zur dreidimensionalen Inspektion technischer Oberflächen

Keck, Alexander, Böhm, Michael, Knierim, Karl Lukas, Sawodny, Oliver, Gronle, Marc, Lyda, Wolfram, Osten, Wolfgang

Journal:

tm - Technisches Messen

Year:

2014

Language:

german

File:

PDF, 610 KB

german, 2014

18

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Optical Micro- and Nanometrology IV - Multilevel optical sectioning based on digital holography with a femtosecond frequency comb laser

Körner, Klaus, Pedrini, Giancarlo, Alexeenko, Igor, Lyda, Wolfram, Steinmetz, Tilo, Holzwarth, Ronald, Osten, Wolfgang, Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang

Year:

2012

Language:

english

File:

PDF, 580 KB

english, 2012

19

A control system for automated multiscale measuring systems

Jan Zimmermann, Oliver Sawodny, Wolfram Lyda, Wolfgang Osten

Journal:

Year:

2012

Language:

english

File:

PDF, 973 KB

english, 2012

20

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Robust signal evaluation for Chromatic Confocal Spectral Interferometry

Boettcher, Tobias, Lehmann, Peter H., Osten, Wolfgang, Lyda, Wolfram, Gronle, Marc, Albertazzi, Armando, Mauch, Florian, Osten, Wolfgang

Year:

2013

Language:

english

File:

PDF, 517 KB

english, 2013

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